Ion Implantation Damage
Aug. 20, 2024
The ion implantation damage results obtained by the cross-section ... 22. Sketch of damage accumulation after a high-dose ion implant ... 4.19. Sketch of as-implanted and annealed damage for the same ... a) XTEM images of the damage band in the 100 keV H + ion implanted ... | Ion Implantation Damage